Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Hirotaka Satori, Makoto Kashiwagi, Manato Furusawa | 2023-07-18 |
| 11618123 | Polishing method and polishing apparatus | Tetsuji Togawa, Atsushi Yoshida | 2023-04-04 |