Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Yu Ishii, Hirotaka Satori, Makoto Kashiwagi | 2023-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Yu Ishii, Hirotaka Satori, Makoto Kashiwagi | 2023-07-18 |