Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804398 | Workpiece supporting apparatus and workpiece supporting method | Mao Izawa | 2023-10-31 |
| 11701750 | Top ring for holding a substrate and substrate processing apparatus | Yu Ishii, Hirotaka Satori, Manato Furusawa | 2023-07-18 |
| 11697184 | Substrate processing apparatus and substrate processing method | Manao Hoshina | 2023-07-11 |
| 11638980 | Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Manao Hoshina | 2023-05-02 |