Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11697184 | Substrate processing apparatus and substrate processing method | Makoto Kashiwagi | 2023-07-11 |
| 11638980 | Laminated membrane, substrate holder including laminated membrane, and substrate processing apparatus | Kenichi Kobayashi, Asagi Matsugu, Makoto Kashiwagi | 2023-05-02 |