Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| D989012 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more | 2023-06-13 |
| 11654524 | Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus | Tomoko Owada, Osamu Nabeya, Yuta Suzuki | 2023-05-23 |
| 11548113 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Tomoshi Inoue | 2023-01-10 |