Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D989012 | Elastic membrane | Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more | 2023-06-13 |
| D981969 | Elastic membrane for semiconductor wafer polishing apparatus | Tomoko Owada, Osamu Nabeya, Makoto Fukushima, Yuichi Kato | 2023-03-28 |
| D981459 | Retaining ring for substrate | Osamu Nabeya | 2023-03-21 |