Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| D981969 | Elastic membrane for semiconductor wafer polishing apparatus | Kenichi Akazawa, Tomoko Owada, Osamu Nabeya, Yuichi Kato | 2023-03-28 |
| 11548113 | Method and apparatus for polishing a substrate | Tetsuji Togawa, Shingo Togashi, Tomoshi Inoue | 2023-01-10 |