Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11752590 | Polishing head and polishing apparatus | Yuichi Kato | 2023-09-12 |
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Makoto Fukushima, Keisuke Namiki, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| D989012 | Elastic membrane | Kenichi Akazawa, Shingo Togashi, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more | 2023-06-13 |
| 11654524 | Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus | Tomoko Owada, Yuta Suzuki, Shingo Togashi | 2023-05-23 |
| D981969 | Elastic membrane for semiconductor wafer polishing apparatus | Kenichi Akazawa, Tomoko Owada, Makoto Fukushima, Yuichi Kato | 2023-03-28 |
| D981459 | Retaining ring for substrate | Kenichi Akazawa | 2023-03-21 |