Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Makoto Fukushima, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |