Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11607769 | Polishing apparatus of substrate | Tetsuji Togawa, Masahiro Hatakeyama | 2023-03-21 |
| 11597051 | Method for polishing substrate including functional chip | Tetsuji Togawa, Masahiro Hatakeyama | 2023-03-07 |