Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11607769 | Polishing apparatus of substrate | Tetsuji Togawa, Hiroshi Sobukawa | 2023-03-21 |
| 11597051 | Method for polishing substrate including functional chip | Tetsuji Togawa, Hiroshi Sobukawa | 2023-03-07 |
| 11583973 | Polishing apparatus | Hiroyuki Shinozaki, Yuta Suzuki, Taro Takahashi, Seiji Katsuoka | 2023-02-21 |