Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731240 | Substrate processing apparatus | Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| 11541502 | Substrate processing apparatus | Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more | 2023-01-03 |