Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846536 | Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly | Mitsuru Miyazaki | 2023-12-19 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Mitsuru Miyazaki, Takuya Inoue | 2023-08-22 |