Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839948 | Polishing apparatus | Takashi Yamazaki, Ryuichi Kosuge, Tadakazu Sone | 2023-12-12 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Toshio Mizuno, Mitsuru Miyazaki, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| 11673222 | Polishing head system and polishing apparatus | Katsuhide Watanabe | 2023-06-13 |