Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11833636 | Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate | Yoichi Shiokawa, Keita Yagi, Akira Nakamura | 2023-12-05 |
| 11759912 | Magnetic element and eddy current sensor using the same | Taro Takahashi, Hiroaki Shibue | 2023-09-19 |
| 11673222 | Polishing head system and polishing apparatus | Itsuki Kobata | 2023-06-13 |