Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839948 | Polishing apparatus | Takashi Yamazaki, Itsuki Kobata, Ryuichi Kosuge | 2023-12-12 |
| 11642755 | Apparatus for polishing and method for polishing | Pohan Chen, Hiroshi Sotozaki | 2023-05-09 |
| 11612983 | Polishing apparatus and polishing method | Hiroshi Sotozaki | 2023-03-28 |