Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846536 | Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly | Naoki Toyomura | 2023-12-19 |
| 11766756 | Substrate support apparatus and substrate cleaning apparatus | — | 2023-09-26 |
| 11731240 | Substrate processing apparatus | Kuniaki Yamaguchi, Itsuki Kobata, Toshio Mizuno, Naoki Toyomura, Takuya Inoue | 2023-08-22 |
| D992845 | Roller shaft for substrate cleaning | Tomoaki Fujimoto, Takuya Inoue | 2023-07-18 |