Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Soichi Isobe, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more | 2023-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Soichi Isobe, Koji Maeda, Kenji Shinkai, Hidetatsu Isokawa +5 more | 2023-01-03 |