Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai +5 more | 2023-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541502 | Substrate processing apparatus | Kuniaki Yamaguchi, Hiroshi Shimomoto, Soichi Isobe, Koji Maeda, Kenji Shinkai +5 more | 2023-01-03 |