Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11643724 | Method of forming structures using a neutral beam | Tomohiro Kubota, Toshihisa Nozawa, Seiji Samukawa, Hua Chen | 2023-05-09 |
| 11646197 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2023-05-09 |
| 11626316 | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure | Yan Zhang, Yoshio Susa, Atsuki Fukazawa | 2023-04-11 |