Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705333 | Structures including multiple carbon layers and methods of forming and using same | Ryo Miyama, Yoshiyuki Kikuchi | 2023-07-18 |
| 11646197 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Mitsuya Utsuno, Atsuki Fukazawa, Toshio Nakanishi | 2023-05-09 |
| 11626316 | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure | Mitsuya Utsuno, Yan Zhang, Atsuki Fukazawa | 2023-04-11 |