Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11626316 | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure | Mitsuya Utsuno, Yoshio Susa, Atsuki Fukazawa | 2023-04-11 |