Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776846 | Methods for depositing gap filling fluids and related systems and devices | — | 2023-10-03 |
| 11646197 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Mitsuya Utsuno, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2023-05-09 |
| 11572620 | Methods for selectively depositing an amorphous silicon film on a substrate | — | 2023-02-07 |