Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11643724 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Seiji Samukawa, Hua Chen | 2023-05-09 |
| 11605528 | Plasma device using coaxial waveguide, and substrate treatment method | Jun Yoshikawa | 2023-03-14 |