Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605528 | Plasma device using coaxial waveguide, and substrate treatment method | Toshihisa Nozawa | 2023-03-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605528 | Plasma device using coaxial waveguide, and substrate treatment method | Toshihisa Nozawa | 2023-03-14 |