Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae +4 more | 2023-08-22 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang +2 more | 2023-01-03 |