Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410830 | Defect inspection and review using transmissive current image of charged particle beam system | Hong Xiao, Lawrence P. Muray, Nick Petrone, John Gerling, Alan D. Brodie +3 more | 2022-08-09 |
| 11270430 | Wafer inspection using difference images | Xiaochun Li, Pavan Kumar, Junqing Huang, Lisheng Gao, Grace Hsiu-Ling Chen +2 more | 2022-03-08 |
| 11257207 | Inspection of reticles using machine learning | Hawren Fang, Rui-fang Shi | 2022-02-22 |