Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469571 | Fast phase-shift interferometry by laser frequency shift | Haifeng Huang, Daniel Wack | 2022-10-11 |
| 11442021 | Broadband light interferometry for focal-map generation in photomask inspection | Dmitry Skvortsov | 2022-09-13 |
| 11333487 | Common path mode fiber tip diffraction interferometer for wavefront measurement | Haifeng Huang, Dan Wack, Robert Kestner | 2022-05-17 |
| 11312888 | Two-component solventless adhesive compositions and methods of making same | Zhaohui Qu | 2022-04-26 |
| 11257207 | Inspection of reticles using machine learning | Hawren Fang, Abdurrahman Sezginer | 2022-02-22 |