Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410830 | Defect inspection and review using transmissive current image of charged particle beam system | Hong Xiao, Lawrence P. Muray, Nick Petrone, John Gerling, Abdurrahman Sezginer +3 more | 2022-08-09 |
| 11302511 | Field curvature correction for multi-beam inspection systems | Alan D. Brodie, Rainer Knippelmeyer, Christopher Sears, John Rouse | 2022-04-12 |
| 11270430 | Wafer inspection using difference images | Abdurrahman Sezginer, Xiaochun Li, Pavan Kumar, Junqing Huang, Lisheng Gao +2 more | 2022-03-08 |