Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527379 | Objective lens arrangement usable in particle-optical systems | Stefan Schubert | 2022-12-13 |
| 11302511 | Field curvature correction for multi-beam inspection systems | Alan D. Brodie, Christopher Sears, John Rouse, Grace Hsiu-Ling Chen | 2022-04-12 |