Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Andreas Fischer, Ivan L. Berry, III, Nerissa Draeger, Richard A. Gottscho | 2022-12-06 |
| 11380556 | Thermal atomic layer etch with rapid temperature cycling | Theodoros Panagopoulos, Andreas Fischer | 2022-07-05 |
| 11289306 | Ion beam etching utilizing cryogenic wafer temperatures | Ivan L. Berry, III, Anthony J. Ricci | 2022-03-29 |
| 11239420 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Meihua Shen, Shane Tang, Kathryn M. Kelchner +4 more | 2022-02-01 |