Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488812 | Method and apparatus for reducing particle defects in plasma etch chambers | Xikun Wang, Andrew Nguyen, Changhun Lee, Xiaoming He | 2022-11-01 |
| 11239420 | Conformal damage-free encapsulation of chalcogenide materials | James S. Sims, Andrew John McKerrow, Thorsten Lill, Shane Tang, Kathryn M. Kelchner +4 more | 2022-02-01 |