Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Thorsten Lill, Andreas Fischer, Ivan L. Berry, III, Richard A. Gottscho | 2022-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Thorsten Lill, Andreas Fischer, Ivan L. Berry, III, Richard A. Gottscho | 2022-12-06 |