Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Thorsten Lill, Andreas Fischer, Ivan L. Berry, III, Nerissa Draeger | 2022-12-06 |
| 11276564 | Plasma processing system having an inspection tool and controller that interfaces with a tool model | — | 2022-03-15 |
| 11263737 | Defect classification and source analysis for semiconductor equipment | Kapil Sawlani, Michal Danek, Keith Wells, Keith J. Hansen | 2022-03-01 |