Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11263737 | Defect classification and source analysis for semiconductor equipment | Richard A. Gottscho, Michal Danek, Keith Wells, Keith J. Hansen | 2022-03-01 |
| 11225712 | Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack | Joshua Collins, Siew Neo, Hanna Bamnolker | 2022-01-18 |