Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Thorsten Lill, Andreas Fischer, Nerissa Draeger, Richard A. Gottscho | 2022-12-06 |
| 11289306 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Anthony J. Ricci | 2022-03-29 |