Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302556 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2022-04-12 |
| 11289306 | Ion beam etching utilizing cryogenic wafer temperatures | Thorsten Lill, Ivan L. Berry, III | 2022-03-29 |