TP

Theodoros Panagopoulos

Lam Research: 1 patents #75 of 246Top 35%
Overall (2022): #233,309 of 548,613Top 45%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11380556 Thermal atomic layer etch with rapid temperature cycling Andreas Fischer, Thorsten Lill 2022-07-05