Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508554 | High voltage filter assembly | Anurag Kumar Mishra, James Rogers, Rajinder Dhindsa, Olivier Luere | 2022-11-22 |
| 11482402 | Methods and apparatus for processing a substrate | Rajinder Dhindsa, Olivier Luere, Evgeny Kamenetskiy | 2022-10-25 |
| 11476145 | Automatic ESC bias compensation when using pulsed DC bias | James Rogers, Linying Cui | 2022-10-18 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 11284500 | Method of controlling ion energy distribution using a pulse generator | Olivier Luere, Rajinder Dhindsa, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2022-03-22 |