Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524382 | Polishing apparatus using machine learning and compensation for pad thickness | Kun Xu, Denis Ivanov, Harry Q. Lee | 2022-12-13 |
| 11504821 | Predictive filter for polishing pad wear rate monitoring | Sivakumar Dhandapani | 2022-11-22 |
| 11507824 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Thomas H. Osterheld | 2022-11-22 |
| 11508859 | Method for forming doped epitaxial layer of contact image sensor | Chenchen Qiu, Chang Sun, Zhengying Wei | 2022-11-22 |
| 11479856 | Multi-cycle ALD process for film uniformity and thickness profile modulation | Purushottam Kumar, Adrien LaVoie, Hu Kang, Tuan Nguyen, Ye Wang | 2022-10-25 |
| 11449016 | Action control method and apparatus | Xinyu Wang, Chen Chen | 2022-09-20 |
| 11255017 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin, Sung Je Kim | 2022-02-22 |