Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443975 | Planar substrate edge contact with open volume equalization pathways and side containment | Patrick Breiling, Ramesh Chandrasekharan, Karl Leeser, Paul Konkola, Adrien LaVoie +7 more | 2022-09-13 |
| 11255017 | Systems and methods for flow monitoring in a precursor vapor supply system of a substrate processing system | Jun Qian, Purushottam Kumar, Adrien LaVoie, You Zhai, Jeremiah Baldwin | 2022-02-22 |