Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521836 | Plasma processing apparatus | Eun-Woo Lee, Kyo-Hyeok Kim, Hyo Sung Kim, Seung Bo Shim, Kyung-Hoon Lee +3 more | 2022-12-06 |
| 11521866 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2022-12-06 |
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Sang Rok Oh +3 more | 2022-11-15 |
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2022-09-06 |
| 11437222 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Jung Pyo Hong, Jung-Mo Sung | 2022-09-06 |
| 11289309 | Device for providing gas to a plasma chamber and a plasma processing device including the same | Hyung Jun Kim, Kwang-Nam Kim, Sung Yeon Kim, Sang Rok Oh, Jung Pyo Hong | 2022-03-29 |
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Dong Hyeon NA, Seung Bo Shim, Ha Dong JIN, Min Hur, Kyo-Hyeok Kim +1 more | 2022-03-22 |