Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538660 | Plasma processing apparatus and method of fabricating semiconductor device using same | Yoong Chung, Nam-Kyun Kim, Naohiko Okunishi, Kyung-Sun Kim, Sang Ho Lee +1 more | 2022-12-27 |
| 11521836 | Plasma processing apparatus | Eun-Woo Lee, Kyo-Hyeok Kim, Hyo Sung Kim, Jong-Woo Sun, Kyung-Hoon Lee +3 more | 2022-12-06 |
| 11501953 | Plasma processing equipment | Doug Yong Sung, Young-Jin Noh, Yong-Woo Lee, Ji-Soo Im, HYEONG MO KANG +3 more | 2022-11-15 |
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Dong Hyeon NA, Ha Dong JIN, Min Hur, Kyo-Hyeok Kim, Jong-Woo Sun +1 more | 2022-03-22 |