Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538660 | Plasma processing apparatus and method of fabricating semiconductor device using same | Yoong Chung, Nam-Kyun Kim, Kyung-Sun Kim, Seung Bo Shim, Sang Ho Lee +1 more | 2022-12-27 |
| 11501958 | Plasma processing apparatus | Nozomu Nagashima, Tomoyuki Takahashi | 2022-11-15 |
| 11495443 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2022-11-08 |
| 11456160 | Plasma processing apparatus | Katsumi Sekiguchi, Ryuichi Yui | 2022-09-27 |