Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501958 | Plasma processing apparatus | Naohiko Okunishi, Tomoyuki Takahashi | 2022-11-15 |
| 11495443 | Filter device and plasma processing apparatus | Naohiko Okunishi | 2022-11-08 |
| 11328908 | Adjustment method for filter unit and plasma processing apparatus | Ryuichi Yui | 2022-05-10 |