Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456160 | Plasma processing apparatus | Naohiko Okunishi, Katsumi Sekiguchi | 2022-09-27 |
| 11328908 | Adjustment method for filter unit and plasma processing apparatus | Nozomu Nagashima | 2022-05-10 |