Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521836 | Plasma processing apparatus | Eun-Woo Lee, Hyo Sung Kim, Jong-Woo Sun, Seung Bo Shim, Kyung-Hoon Lee +3 more | 2022-12-06 |
| 11282678 | Method of controlling uniformity of plasma and plasma processing system | Dong Hyeon NA, Seung Bo Shim, Ha Dong JIN, Min Hur, Jong-Woo Sun +1 more | 2022-03-22 |