Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang Rok Oh +3 more | 2022-11-15 |
| 11289309 | Device for providing gas to a plasma chamber and a plasma processing device including the same | Hyung Jun Kim, Sung Yeon Kim, Jong-Woo Sun, Sang Rok Oh, Jung Pyo Hong | 2022-03-29 |