Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun +3 more | 2022-11-15 |
| 11491664 | Robotic platform manipulating peripeheral nerve system | Keehoon Kim, Yong Seok Ihn, Donghyun Hwang, Sehyuk Yim, Jinwoo Jeong | 2022-11-08 |
| 11289309 | Device for providing gas to a plasma chamber and a plasma processing device including the same | Hyung Jun Kim, Kwang-Nam Kim, Sung Yeon Kim, Jong-Woo Sun, Jung Pyo Hong | 2022-03-29 |