Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501987 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun +3 more | 2022-11-15 |
| 11456349 | Display device having flexible film with window portion | So Ra Bak, Jong Woo Park, Su In Jin | 2022-09-27 |
| 11437222 | Plasma processing apparatus and method of manufacturing semiconductor device using the same | Jong-Woo Sun, Jung-Mo Sung | 2022-09-06 |
| 11289309 | Device for providing gas to a plasma chamber and a plasma processing device including the same | Hyung Jun Kim, Kwang-Nam Kim, Sung Yeon Kim, Jong-Woo Sun, Sang Rok Oh | 2022-03-29 |